Base Temperture
| 1st STG[K] | under 35K | No Load |
|---|---|---|
| 2nd STG[K] | under 11K | No Load |
Cooling Capacity
| 1st STG[W] | 13 | at 77K(60Hz) |
|---|---|---|
| 2nd STG[W] | 3 | at 20K(60Hz) |
The core of the cryopump is a two-stage cryogenic chiller that forms a closed loop cycle with a helium compressor. This refrigerator follows the refrigeration cycle of Gifford-McMahon and can reach cryogenic temperatures below 8K (-265℃), and various line-ups are built according to the heat capacity of the first and second stages.
