|1st STG[K]||under 35K||No Load|
|2nd STG[K]||under 11K||No Load|
|1st STG[W]||13||at 77K(60Hz)|
|2nd STG[W]||3||at 20K(60Hz)|
The core of the cryopump is a two-stage cryogenic chiller that forms a closed loop cycle with a helium compressor. This refrigerator follows the refrigeration cycle of Giﬀord-McMahon and can reach cryogenic temperatures below 8K (-265℃), and various line-ups are built according to the heat capacity of the ﬁrst and second stages.