| Specification | ||
|---|---|---|
| Pumping speed | N2 (ℓ/s) | 10,000 |
| H2 (ℓ/s) | 13,000 | |
| Ar (ℓ/s) | 8,400 | |
| Water (ℓ/s) | 30,000 | |
| Pumping capacity | Ar (Std.ℓ) | 6,000 |
| H2 (Std.ℓ) | 46 | |
| Maximum throughput | Ar (Torrㆍℓ/s) | 18 |
| H2 (Torrㆍℓ/s) | – | |
| Base pressure | (Torr) | <10-9 |
| Cool down time (20K) | Minute | 150 |
| Weight | Weight (Kg) | 105 |
| Inlet flange size | mm | 500 |
| Mounting flange | JIS, DN | |
* All GENCRYO pumps required the following components:
Compressor, Helium hoses, electrical cables, heater cables, and power distribution box.
양산중인 GENCRYO Pump Series
| Type | Model | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| GENCRYO Model | GEN20SH | GEN25SH | GEN30SH | GEN32SH | GEN40SH | GEN40PH | GEN50SH | GEN50PH | GEN55SH |
| Pump Size | 200mm ~ 250mm (8~10 inch) |
300mm ~ 320mm (12 inch) |
400mm (16 inch) |
500mm (20 inch) |
550mm (22 inch) |
||||
| Application | Semiconductor | Display | |||||||
| Type | Model | ||||||
|---|---|---|---|---|---|---|---|
| GENCRYO Model | GEN15S, GEN20S, GEN25S, GEN30S |
GEN40S, GEN40P | GEN50S, GEN50P | GEN55C, GEN55S, GEN55P, GEN55L |
GEN63S | GEN75S | GEN90S |
| Pump Size | 150mm ~ 300mm | 400mm | 500mm | 550mm | 630mm | 750mm | 900mm |
| Application | Semiconductor | Display | Astronautics | ||||
