GEN40SH

Cryopump (GENCRYO Series)

All GENCRYO pumps required the following components:
Compressor, Helium hoses, electrical cables, heater cables, and power distribution box.

형태에 따라 Horizontal, Vertical Type이 있으며
고객 맞춤형으로 최대구경 900mm 생산가능

Specification
Pumping speed N2 (ℓ/s) 5,000
H2 (ℓ/s) 10,000
Ar (ℓ/s) 4,500
Water (ℓ/s) 16,000
Pumping capacity Ar (Std.ℓ) 4,500
H2 (Std.ℓ) 40
Maximum throughput Ar (Torrㆍℓ/s) 10
H2 (Torrㆍℓ/s)
Base pressure (Torr) <10-9
Cool down time (20K) Minute 150
Weight Weight (Kg) 60
Inlet flange size mm 400
Mounting flange ANSI ASA, ANSI ASA Rotatable,
ISO Clamp, ISO Bolted, Con Flat,
Conflat Rotatable, JIS

* All GENCRYO pumps required the following components:
Compressor, Helium hoses, electrical cables, heater cables, and power distribution box.

 

양산중인 GENCRYO Pump Series

Type Model
GENCRYO Model GEN20SH GEN25SH GEN30SH GEN32SH GEN40SH GEN40PH GEN50SH GEN50PH GEN55SH
Pump Size 200mm ~ 250mm
(8~10 inch)
300mm ~ 320mm
(12 inch)
400mm
(16 inch)
500mm
(20 inch)
550mm
(22 inch)
Application Semiconductor Display
Type Model
GENCRYO Model GEN15S, GEN20S,
GEN25S, GEN30S
GEN40S, GEN40P GEN50S, GEN50P GEN55C, GEN55S,
GEN55P, GEN55L
GEN63S GEN75S GEN90S
Pump Size 150mm ~ 300mm 400mm 500mm 550mm 630mm 750mm 900mm
Application Semiconductor Display Astronautics